INVESTIGATIONS OF STRUCTURE OF THIN FLUOROCARBON FILMS BY X-RAY DIFFRACTION AND INFRARED SPECTROSCOPY

被引：26

作者：

GIEGENGACK, H

HINZE, D

机构：

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 1971年 / 8卷 / 02期

关键词：

D O I：

10.1002/pssa.2210080221

中图分类号：

T [工业技术];

学科分类号：

08 ;

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页码：513 / +

页数：1

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