THE PREPARATION OF LARGE SEMICONDUCTOR CLUSTERS VIA THE PYROLYSIS OF A MOLECULAR PRECURSOR

被引：188

作者：

BRENNAN, JG ^{[1
]}

SIEGRIST, T ^{[1
]}

CARROLL, PJ ^{[1
]}

STUCZYNSKI, SM ^{[1
]}

BRUS, LE ^{[1
]}

STEIGERWALD, ML ^{[1
]}

机构：

[1] AT&T BELL LABS,MURRAY HILL,NJ 07974

来源：

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY | 1989年 / 111卷 / 11期

关键词：

D O I：

10.1021/ja00193a079

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：4141 / 4143

页数：3

共 32 条

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[J]. INORGANIC CHEMISTRY, 1981, 20 (11) : 3924 - 3928
[10] TITANIUM, ZIRCONIUM, AND HAFNIUM TETRAHYDROBORATES AS TAILORED CVD PRECURSORS FOR METAL DIBORIDE THIN-FILMS
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