A METHOD OF CORRECTING THE DISTORTED SPOT SHAPE OF A DEFLECTED ELECTRON-PROBE BY MEANS OF DYNAMIC FOCUSING AND STIGMATOR

被引：7

作者：

KANAYA, K

BABA, N

机构：

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1980年 / 13卷 / 04期

关键词：

D O I：

10.1088/0022-3735/13/4/014

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：415 / 426

页数：12

共 21 条

[1] ELECTRON-OPTICAL INVESTIGATION OF ORIGIN OF ASYMMETRIES IN AIR-CORED SOLENOIDS
AMBOSS, K
JENNINGS, JC
[J]. JOURNAL OF APPLIED PHYSICS, 1970, 41 (04) : 1608 - &
[2] MAGNETIC DEFLEXION OF ELECTRON BEAMS WITHOUT ASTIGMATISM
ARCHARD, GD
MULVEY, T
[J]. JOURNAL OF SCIENTIFIC INSTRUMENTS, 1958, 35 (08): : 279 - 283
[3] GLASER W, 1956, HDB PHYSIK, P174
[4] GRUMM H, 1954, OPTIK, V11, P32
[5] ELECTRON BEAM DEFLECTION .1. SMALL-ANGLE DEFLECTION THEORY
HUTTER, RGE
[J]. JOURNAL OF APPLIED PHYSICS, 1947, 18 (08) : 740 - 758
[6] ELECTRON BEAM DEFLECTION .2. APPLICATIONS OF THE SMALL-ANGLE DEFLECTION THEORY
HUTTER, RGE
[J]. JOURNAL OF APPLIED PHYSICS, 1947, 18 (09) : 797 - 810
[7] ITO K, 1957, J ELECTRON MICROSC, V5, P3
[8] ITO K, 1954, J ELECTRONMICROSCOPY, V2, P10
[9] KAASHOEK KJ, 1968, PHILIPS RES REPT S11
[10] KANAYA K, 1960, J ELECTRON MICROSC, V9, P71