METAL MOLECULES, METAL-CLUSTERS AND METAL BUMPS

被引:18
作者
DILELLA, DP [1 ]
LIPSON, RH [1 ]
MCBREEN, P [1 ]
MOSKOVITS, M [1 ]
机构
[1] UNIV TORONTO,ERINDALE COLL,TORONTO M5S 1A1,ONTARIO,CANADA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 02期
关键词
D O I
10.1116/1.570761
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:453 / 459
页数:7
相关论文
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