OXIDATION OF SILICON BY OXYGEN - A RATE-EQUATION

被引：12

作者：

DOREMUS, RH

SZEWCZYK, A

机构：

来源：

JOURNAL OF MATERIALS SCIENCE | 1987年 / 22卷 / 08期

关键词：

D O I：

10.1007/BF01086486

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：2887 / 2892

页数：6

共 16 条

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