ELLIPSOMETRIC STUDY OF THE GLASS-TRANSITION AND THERMAL-EXPANSION COEFFICIENTS OF THIN POLYMER-FILMS

被引:163
作者
BEAUCAGE, G [1 ]
COMPOSTO, R [1 ]
STEIN, RS [1 ]
机构
[1] UNIV MASSACHUSETTS,DEPT POLYMER SCI & ENGN,AMHERST,MA 01003
关键词
THERMAL EXPANSION; THIN FILMS; ELLIPSOMETER; GLASS TRANSITION; REFRACTIVE INDEX;
D O I
10.1002/polb.1993.090310310
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
The glass transition (T(g)) of thin polystyrene films (ca. 3000 angstrom) cast on silicon wafers was determined by a new technique. An ellipsometer was used to determine the refractive index and thickness of the polystyrene films. T(g) was determined by measuring the temperature dependence of the refractive index. The change in thickness with temperature was used to calculate the linear and bulk thermal expansion coefficients of the material. A significant shift in T(g), possibly due to strains induced in the cooled films, was observed between heating and cooling for polystyrene films.
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页码:319 / 326
页数:8
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