DETERMINATION OF THERMAL-PROPERTIES OF HYDROGENATED AMORPHOUS-CARBON FILMS VIA MIRAGE EFFECT MEASUREMENTS

被引：33

作者：

HURLER, W ^{[1
]}

PIETRALLA, M ^{[1
]}

HAMMERSCHMIDT, A ^{[1
]}

机构：

[1] SIEMENS CORP RES & DEV,D-91056 ERLANGEN,GERMANY

来源：

关键词：

AMORPHOUS HYDROGENATED CARBON; THERMAL CONDUCTIVITY; THERMAL DIFFUSIVITY;

D O I：

10.1016/0925-9635(94)00259-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We present a new photothermal method using the mirage effect to measure the thermal properties of thin film materials in a contactless, non-destructive way without the need for sample preparation. A complete theoretical treatment of the mirage signal generation in the case of an homogeneous N-layer system allows the thermal conductivity and the thermal diffusivity to be deduced from experimental data. We investigated the thermal properties of a wide variety of diamond-like or amorphous hydrogenated carbon films deposited in a capacitively coupled parallel plate r.f.-plasma reactor.

引用

页码：954 / 957

页数：4

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