PROPERTIES OF DC MAGNETRON-SPUTTERED LEAD ZIRCONATE TITANATE THIN-FILMS

被引：84

作者：

SREENIVAS, K

SAYER, M

GARRETT, P

机构：

来源：

THIN SOLID FILMS | 1989年 / 172卷 / 02期

关键词：

D O I：

10.1016/0040-6090(89)90653-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：251 / 267

页数：17

共 36 条

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