HIGH THROUGHPUT TANDEM TURBOMOLECULAR PUMP FOR EXTREME HIGH-VACUUM

被引：9

作者：

ENOSAWA, H

URANO, C

KAWASHIMA, T

YAMAMOTO, M

机构：

[1] Seiko Seiki Co, Ltd, Narashino City, Chiba

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1990年 / 8卷 / 03期

关键词：

D O I：

10.1116/1.576665

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This paper reports on the development and evaluation of a turbomolecular pump for extreme high vacuum which, long awaited by the semiconductor manufacturing industry, can discharge a large volume of process gases. The turbomolecular pump is of the oil-free magnetic suspension type and employs the tandem structure (consisting of two directly and coaxially connected pumps) so as to obtain a high compression ratio which is essential to achieve extreme high vacuum. It has undergone considerable improvements in the roughness of the pump interior and rotor surfaces to suppress the outgassing rate. The evaluation of the new turbomolecular pump revealed that it attained an ultimate pressure of 1X10 9 Pa (8X10 12Torr). It also achieved a maximum throughput of 2 Pa m3s 1(1200 seem) (N2) at an inlet pressure of 5.3 Pa (4X 10 2Torr). © 1990, American Vacuum Society. All rights reserved.

引用

页码：2768 / 2771

页数：4