APPLICATION OF THE ION BOMBARDMENT CLEANING METHOD TO TITANIUM, GERMANIUM, SILICON, AND NICKEL AS DETERMINED BY LOW-ENERGY ELECTRON DIFFRACTION

被引：197

作者：

FARNSWORTH, HE

SCHLIER, RE

GEORGE, TH

BURGER, RM

机构：

来源：

关键词：

D O I：

10.1063/1.1723393

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1150 / 1161

页数：12

共 23 条

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