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PRECISE EVALUATION OF OXYGEN MEASUREMENTS ON CZ-SILICON WAFERS
被引:13
作者
:
GRAFF, K
论文数:
0
引用数:
0
h-index:
0
GRAFF, K
机构
:
来源
:
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
|
1983年
/ 130卷
/ 06期
关键词
:
D O I
:
10.1149/1.2119956
中图分类号
:
O646 [电化学、电解、磁化学];
学科分类号
:
081704 ;
摘要
:
引用
收藏
页码:1378 / 1381
页数:4
相关论文
共 3 条
[1]
DETERMINATION OF PARTS PER BILLION OXYGEN IN SILICON THROUGH CALIBRATION OF IR-ABSORPTION AT 77 DEGREES KELVIN
GRAFF, K
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0
引用数:
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h-index:
0
机构:
AEG TELEFUNKEN, HEILBRONN, WEST GERMANY
AEG TELEFUNKEN, HEILBRONN, WEST GERMANY
GRAFF, K
GRALLATH, E
论文数:
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引用数:
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h-index:
0
机构:
AEG TELEFUNKEN, HEILBRONN, WEST GERMANY
AEG TELEFUNKEN, HEILBRONN, WEST GERMANY
GRALLATH, E
ADES, S
论文数:
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引用数:
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h-index:
0
机构:
AEG TELEFUNKEN, HEILBRONN, WEST GERMANY
AEG TELEFUNKEN, HEILBRONN, WEST GERMANY
ADES, S
GOLDBACH, G
论文数:
0
引用数:
0
h-index:
0
机构:
AEG TELEFUNKEN, HEILBRONN, WEST GERMANY
AEG TELEFUNKEN, HEILBRONN, WEST GERMANY
GOLDBACH, G
TOLG, G
论文数:
0
引用数:
0
h-index:
0
机构:
AEG TELEFUNKEN, HEILBRONN, WEST GERMANY
AEG TELEFUNKEN, HEILBRONN, WEST GERMANY
TOLG, G
[J].
SOLID-STATE ELECTRONICS,
1973,
16
(08)
: 887
-
893
[2]
1981, ASTM F12181 43
[3]
1978, DIN50438 1
←
1
→
共 3 条
[1]
DETERMINATION OF PARTS PER BILLION OXYGEN IN SILICON THROUGH CALIBRATION OF IR-ABSORPTION AT 77 DEGREES KELVIN
GRAFF, K
论文数:
0
引用数:
0
h-index:
0
机构:
AEG TELEFUNKEN, HEILBRONN, WEST GERMANY
AEG TELEFUNKEN, HEILBRONN, WEST GERMANY
GRAFF, K
GRALLATH, E
论文数:
0
引用数:
0
h-index:
0
机构:
AEG TELEFUNKEN, HEILBRONN, WEST GERMANY
AEG TELEFUNKEN, HEILBRONN, WEST GERMANY
GRALLATH, E
ADES, S
论文数:
0
引用数:
0
h-index:
0
机构:
AEG TELEFUNKEN, HEILBRONN, WEST GERMANY
AEG TELEFUNKEN, HEILBRONN, WEST GERMANY
ADES, S
GOLDBACH, G
论文数:
0
引用数:
0
h-index:
0
机构:
AEG TELEFUNKEN, HEILBRONN, WEST GERMANY
AEG TELEFUNKEN, HEILBRONN, WEST GERMANY
GOLDBACH, G
TOLG, G
论文数:
0
引用数:
0
h-index:
0
机构:
AEG TELEFUNKEN, HEILBRONN, WEST GERMANY
AEG TELEFUNKEN, HEILBRONN, WEST GERMANY
TOLG, G
[J].
SOLID-STATE ELECTRONICS,
1973,
16
(08)
: 887
-
893
[2]
1981, ASTM F12181 43
[3]
1978, DIN50438 1
←
1
→