CHEMICAL VAPOR-DEPOSITION AND CHARACTERIZATION OF ZRO2 FILMS FROM ORGANOMETALLIC COMPOUNDS

[1] DEPOSITION AND PROPERTIES OF ALUMINUM OXIDE OBTAINED BY PYROLYTIC DECOMPOSITION OF AN ALUMINUM ALKOXIDE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (09) : 948 - &

[2] [Anonymous], 1966, J ELECTROCHEM SOC

[3] THIN-FILMS OF METAL-OXIDES ON SILICON BY CHEMICAL VAPOR-DEPOSITION WITH ORGANOMETALLIC COMPOUNDS .1. [J]. JOURNAL OF CRYSTAL GROWTH, 1972, 17 (DEC) : 298 - &

[4] BALOG M, 1977, THIN SOLID FILMS, V41, P247, DOI 10.1016/0040-6090(77)90312-1

[5] BALOG M, J ELECTROCHEM SOC

[6] OPTICAL ENERGY GAPS IN MONOCLINIC OXIDES OF HAFNIUM AND ZIRCONIUM AND THEIR SOLID SOLUTIONS [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1965, 69 (10) : 3666 - &

[7] HEXAFLUOROACETYLACETONATES OF ZIRCONIUM AND HAFNIUM [J]. INORGANIC CHEMISTRY, 1968, 7 (12) : 2501 - +

[8] Duffy M. T., 1970, RCA Review, V31, P754

[9] INFRA-RED ABSORPTION IN SEMICONDUCTORS [J]. REPORTS ON PROGRESS IN PHYSICS, 1956, 19 : 107 - 155

[10] HARROP PJ, 1962, THIN SOLID FILMS, V2, P271

[1] DEPOSITION AND PROPERTIES OF ALUMINUM OXIDE OBTAINED BY PYROLYTIC DECOMPOSITION OF AN ALUMINUM ALKOXIDE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (09) : 948 - &

[2] [Anonymous], 1966, J ELECTROCHEM SOC

[3] THIN-FILMS OF METAL-OXIDES ON SILICON BY CHEMICAL VAPOR-DEPOSITION WITH ORGANOMETALLIC COMPOUNDS .1. [J]. JOURNAL OF CRYSTAL GROWTH, 1972, 17 (DEC) : 298 - &

[4] BALOG M, 1977, THIN SOLID FILMS, V41, P247, DOI 10.1016/0040-6090(77)90312-1

[5] BALOG M, J ELECTROCHEM SOC

[6] OPTICAL ENERGY GAPS IN MONOCLINIC OXIDES OF HAFNIUM AND ZIRCONIUM AND THEIR SOLID SOLUTIONS [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1965, 69 (10) : 3666 - &

[7] HEXAFLUOROACETYLACETONATES OF ZIRCONIUM AND HAFNIUM [J]. INORGANIC CHEMISTRY, 1968, 7 (12) : 2501 - +

[8] Duffy M. T., 1970, RCA Review, V31, P754

[9] INFRA-RED ABSORPTION IN SEMICONDUCTORS [J]. REPORTS ON PROGRESS IN PHYSICS, 1956, 19 : 107 - 155

[10] HARROP PJ, 1962, THIN SOLID FILMS, V2, P271