DECONVOLUTION METHOD TO OBTAIN COMPOSITION PROFILES FROM SEM BACKSCATTERED ELECTRON SIGNAL PROFILES FOR BULK SPECIMENS

被引：13

作者：

KONKOL, A ^{[1
]}

WILSHAW, PR ^{[1
]}

BOOKER, GR ^{[1
]}

机构：

[1] UNIV OXFORD,DEPT MAT,OXFORD OX1 3PH,ENGLAND

来源：

ULTRAMICROSCOPY | 1994年 / 55卷 / 02期

基金：

匈牙利科学研究基金会;

关键词：

D O I：

10.1016/0304-3991(94)90169-4

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Compositional profiles across CdTe/CdyHg1-yTe interfaces in bulk specimens have been determined from backscattered electron (BSE) atomic-number contrast line profiles obtained using the scanning electron microscope. To improve the spatial resolution in the interface region, a numerical deconvolution method has been developed which enables the distorting effects associated with the beam size, the specimen scattering effects and the detector characteristics to be substantially removed from the BSE profile. The effectiveness of the method is demonstrated by reproducing closely the same compositional profile for individual specimens from BSE profiles obtained at different beam energies. The deconvolution method improved the resolution from similar to 100 to similar to 20 nm.

引用

页码：183 / 195

页数：13

共 13 条

[1] INTERFACE ABRUPTNESS IN LPE GROWN (CDHG) TE LAYERS ON CDTE SUBSTRATES [J].

ASTLES, MG ;

BLACKMORE, G ;

DOSSER, OD ;

HILL, H ;

LYSTER, M ;

BOOKER, GR ;

HILL, M .

JOURNAL OF CRYSTAL GROWTH, 1991, 108 (3-4) :549-553

[2]

HILL M, 1985, I PHYS C SER, V76, P417

[3]

Kraniauskas P., 1992, TRANSFORMS SIGNALS S

[4] LOW-VOLTAGE BACKSCATTERED ELECTRON COLLECTION FOR PACKAGE SUBSTRATES AND INTEGRATED-CIRCUIT INSPECTION [J].

LEE, KL ;

WARD, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06) :3590-3596

[5]

LEUTE V, 1981, PHYS STATUS SOLIDI A, V183, P183

[6]

LYSTER M, UNPUB

[7]

LYSTER M, 1987, I PHYS C SER, V90, P197

[8] A CONSISTENT DEFINITION OF PROBE SIZE AND SPATIAL-RESOLUTION IN THE ANALYTICAL ELECTRON-MICROSCOPE [J].

MICHAEL, JR ;

WILLIAMS, DB .

JOURNAL OF MICROSCOPY-OXFORD, 1987, 147 :289-303

[9]

Newbury D. E., 1984, Electron Beam Interactions with Solids for Microscopy, Microanalysis and Microlithography. Proceedings of the 1st Pfefferkorn Conference, P153

[10]

Press W.H., 1994, NUMERICAL RECIPES C, V2nd ed.

← 1 2 →