INELASTIC BACKGROUND CORRECTION AND QUANTITATIVE SURFACE-ANALYSIS

Electron transport will result in a distortion of electron spectra from solid surfaces. Formulae to correct for these effects are reviewed. The formulae depend on the concentration depth profile. However, one simple formula is reasonably accurate for most in-depth profiles. Inelastic electron scattering cross sections are essential in the formulae. Three methods to determine the inelastic scattering cross section are reviewed. A simple 'universal' cross section is for many solids sufficiently accurate for analysis of electron spectra. The practical use of the algorithms for quantitative surface analysis is outlined and examples are given which demonstrate that the present formalism gives much reduced errors in comparison to traditional algorithms. There is a build in check on the accuracy of the quantitative composition analysis. Thus only if the analysis fails to give a background corrected spectrum of zero intensity in a wide energy range below the peak energy, is it necessary to apply slightly more involved algorithms. Some information on the composition depth profile is also provided by the present formalism. © 1990.