FROM SUBSTRATE TO VLSI - INVESTIGATION OF HARDENED SIMOX WITHOUT EPITAXY, FOR DOSE, DOSE-RATE AND SEU PHENOMENA

被引:41
作者
LERAY, JL [1 ]
DUPONTNIVET, E [1 ]
MUSSEAU, O [1 ]
COIC, YM [1 ]
UMBERT, A [1 ]
LALANDE, P [1 ]
PERE, JF [1 ]
AUBERTONHERVE, AJ [1 ]
BRUEL, M [1 ]
JAUSSAUD, C [1 ]
MARGAIL, J [1 ]
GIFFARD, B [1 ]
TRUCHE, R [1 ]
MARTIN, F [1 ]
机构
[1] CEA, IRDI D LETI, F-38041 GRENOBLE, FRANCE
关键词
D O I
10.1109/23.25464
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1355 / 1360
页数:6
相关论文
共 8 条
[1]  
AUBERTONHERVE AJ, 1988, E SOI WORKSHOP MEYLA
[2]   TRANSIENT RADIATION EFFECTS IN SOI MEMORIES [J].
DAVIS, GE ;
HITE, LR ;
BLAKE, TGW ;
CHEN, CE ;
LAM, HW ;
DEMOYER, R .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1985, 32 (06) :4432-4437
[3]   THE EFFECT OF 1300-1380-DEGREES-C ANNEAL TEMPERATURES AND MATERIAL CONTAMINATION ON THE CHARACTERISTICS OF CMOS/SIMOX DEVICES [J].
JASTRZEBSKI, L ;
IPRI, AC .
IEEE ELECTRON DEVICE LETTERS, 1988, 9 (03) :151-153
[4]   TRANSIENT RADIATION EFFECTS IN SOI STATIC RAM CELLS [J].
MIKAWA, RE ;
ACKERMANN, MR .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1987, 34 (06) :1698-1703
[5]   AN EXPERIMENTAL FACILITY FOR THE STUDY OF EFFECTS OF HEAVY-ION IRRADIATION ON LOGIC MICROCIRCUITS [J].
MUSSEAU, O ;
LERAY, JL ;
PATIN, Y ;
COIC, YM .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 28 (03) :443-452
[6]   NEW CONDITIONS FOR SYNTHESIZING SOI STRUCTURES BY HIGH-DOSE OXYGEN IMPLANTATION [J].
STOEMENOS, J ;
JAUSSAUD, C ;
BRUEL, M ;
MARGAIL, J .
JOURNAL OF CRYSTAL GROWTH, 1985, 73 (03) :546-550
[7]  
TSAO SS, 1987, IEEE T NS, V6, P1686
[8]   EFFECTS OF IONIZING-RADIATION ON N-CHANNEL MOSFETS FABRICATED IN ZONE-MELTING-RECRYSTALLIZED SI FILMS ON SIO2 [J].
TSAUR, BY ;
FAN, JCC ;
TURNER, GW ;
SILVERSMITH, DJ .
ELECTRON DEVICE LETTERS, 1982, 3 (07) :195-197