共 18 条
[7]
ELECTRICAL BREAKDOWN IN THIN DIELECTRIC FILMS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1969, 6 (04)
:518-+
[9]
PROPERTIES OF RF-SPUTTERED AL2O3 FILMS DEPOSITED BY PLANAR MAGNETRON
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1977, 14 (01)
:127-133