OPTICAL FILTERS - MONITORING PROCESS ALLOWING AUTO-CORRECTION OF THICKNESS ERRORS

被引：82

作者：

BOUSQUET, P ^{[1
]}

FORNIER, A ^{[1
]}

KOWALCZYK, R ^{[1
]}

PELLETIER, E ^{[1
]}

ROCHE, P ^{[1
]}

机构：

[1] UNIV PROVENCE, CNRS, CTR ETUDE COUCHES MINCES, MARSEILLE 13, FRANCE

来源：

THIN SOLID FILMS | 1972年 / 13卷 / 02期

关键词：

D O I：

10.1016/0040-6090(72)90297-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：285 / 290

页数：6

共 10 条

[1]

Dufour C., 1952, REV OPT, V31, P1

[2]

FORNIER A, 1971, JUIN SEM CONTR CONT, P21

[3] ON THE LIMITING BAND WIDTH OF INTERFERENCE FILTERS [J].

GIACOMO, P ;

BAUMEISTER, PW ;

JENKINS, FA .

PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1959, 73 (471) :480-489

[4]

GIACOMO P, 1956, REV OPT, V35, P442

[5]

GIACOMO P, 1956, REV OPT, V35, P317

[6]

KNITTLE Z, 1967, 1965 P COLL THIN FIL, P153

[7] TOLERANCES FOR LAYER THICKNESSES IN DIELECTRIC MULTILAYER COATINGS AND INTERFERENCE FILTERS [J].

MIELENZ, KD .

JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1960, 64 (06) :487-495

[8]

PELLETIER E, 1970, THESIS PARIS

[9]

PELLETIER E, 1972, NOUV REV OPTIQUE APP, V3, P133

[10] DESIGN OF MULTILAYER FILTERS BY CONSIDERING 2 EFFECTIVE INTERFACES [J].

SMITH, SD .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1958, 48 (01) :43-50

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