PRODUCTION MECHANISM IN AN ECR-TYPE MULTIPLY-CHARGED ION-SOURCE

被引：2

作者：

ODA, K ^{[1
]}

ABE, N ^{[1
]}

YAMAMOTO, T ^{[1
]}

KAWANISHI, M ^{[1
]}

机构：

[1] OSAKA UNIV,WELDING RES INST,SUITA,OSAKA 565,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1981年 / 20卷 / 05期

关键词：

D O I：

10.1143/JJAP.20.955

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：955 / 961

页数：7

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