RESONATING SILICON BEAM FORCE SENSOR

[1] FORCE AND WEIGHT MEASUREMENT [J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1982, 15 (09): : 857 - 872

[2] KIRMAN RG, 1983, JUN P TRANSD TEMPC C, P97

[3] Nisse E. P. E., 1980, U.S. Patent, Patent No. [4 215 570 A, 4215570]

[4] SMITS JG, 1985, 3RD P INT C SOL STAT, P93

[5] TIMOSHENKO S, 1974, VIBRATION PROBLEMS E, P408

[6] Ueda T., 1984, Recent Advances in Weighing Technology and Force Measurement. 10th International Conference of the IMEKO Technical Committee TC-3 on Measurement of Force and Mass (Preprints received), P17

[7] PRECISE MEASUREMENT OF SMALL FORCES [J]. SENSORS AND ACTUATORS, 1983, 4 (04): : 483 - 495

[1] FORCE AND WEIGHT MEASUREMENT [J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1982, 15 (09): : 857 - 872

[2] KIRMAN RG, 1983, JUN P TRANSD TEMPC C, P97

[3] Nisse E. P. E., 1980, U.S. Patent, Patent No. [4 215 570 A, 4215570]

[4] SMITS JG, 1985, 3RD P INT C SOL STAT, P93

[5] TIMOSHENKO S, 1974, VIBRATION PROBLEMS E, P408

[6] Ueda T., 1984, Recent Advances in Weighing Technology and Force Measurement. 10th International Conference of the IMEKO Technical Committee TC-3 on Measurement of Force and Mass (Preprints received), P17

[7] PRECISE MEASUREMENT OF SMALL FORCES [J]. SENSORS AND ACTUATORS, 1983, 4 (04): : 483 - 495