IMAGING OF TRI-BAR TARGETS AND THEORETICAL RESOLUTION LIMIT IN PARTIALLY COHERENT ILLUMINATION

被引：4

作者：

GRIMES, DN

机构：

来源：

关键词：

D O I：

10.1364/JOSA.61.000870

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：870 / &

共 16 条

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