PREPARATION OF PBTIO3 FERROELECTRIC THIN-FILM BY RF SPUTTERING

被引：52

作者：

OKUYAMA, M ^{[1
]}

MATSUI, Y ^{[1
]}

NAKANO, H ^{[1
]}

NAKAGAWA, T ^{[1
]}

HAMAKAWA, Y ^{[1
]}

机构：

[1] SETSUNAN UNIV,FAC ENGN,OSAKA,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1979年 / 18卷 / 08期

关键词：

D O I：

10.1143/JJAP.18.1633

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

[No abstract available]

引用

页码：1633 / 1634

页数：2

共 9 条

[1]

GAVRILYACHENKO VG, 1970, FIZ TVERD TELA+, V12, P1203

[2] ELECTROMECHANICAL PROPERTIES OF PBTIO3 CERAMICS CONTAINING LA AND MN [J].

IKEGAMI, S ;

UEDA, I ;

NAGATA, T .

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[3] PREPARATION AND PROPERTIES OF FERROELECTRIC PLZT THIN-FILMS BY RF SPUTTERING [J].

ISHIDA, M ;

MATSUNAMI, H ;

TANAKA, T .

JOURNAL OF APPLIED PHYSICS, 1977, 48 (03) :951-953

[4]

MATSUI Y, 1978, 1ST P FERR MAT THEIR, P37

[5]

NAKAGAWA T, UNPUBLISHED

[6] PREPARATION OF PB(ZR,TI)O3 THIN-FILMS BY AN ELECTRON-BEAM EVAPORATION TECHNIQUE [J].

OIKAWA, M ;

TODA, K .

APPLIED PHYSICS LETTERS, 1976, 29 (08) :491-492

[7] ELECTRICAL-PROPERTIES OF LEAD-ZIRCONATE-LEAD-TITANATE FERROELECTRIC THIN-FILMS AND THEIR COMPOSITION ANALYSIS BY AUGER-ELECTRON SPECTROSCOPY [J].

OKADA, A .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (08) :4495-4499

[8] PRESSURE AND TEMPERATURE DEPENDENCE OF DIELECTRIC PROPERTIES AND PHASE TRANSITIONS OF FERROELECTRIC PEROVSKITES - PBTIO3 AND BATIO3 [J].

SAMARA, GA .

FERROELECTRICS, 1971, 2 (04) :277-&

[9] FERROELECTRIC PLZT THIN-FILMS FABRICATED BY RF SPUTTERING [J].

TANAKA, K ;

HIGUMA, Y ;

YOKOYAMA, K ;

NAKAGAWA, T ;

HAMAKAWA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1976, 15 (07) :1381-1382

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