TOTAL REFLECTION X-RAY-FLUORESCENCE SPECTROMETRY FOR QUANTITATIVE SURFACE AND LAYER ANALYSIS

被引:88
作者
WEISBROD, U [1 ]
GUTSCHKE, R [1 ]
KNOTH, J [1 ]
SCHWENKE, H [1 ]
机构
[1] GESELL KERNENERGIEVERWERTUNG SCHIFFBAU SCHIFFAHRT FORSCHUNGSZENTRUM,INST PHYS,W-2054 GEESTHACHT,GERMANY
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1991年 / 53卷 / 05期
关键词
07.85; 68.35;
D O I
10.1007/BF00348161
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Measurements of X-ray fluorescence spectra versus grazing incident angles provide information on elemental composition as well as density and thickness of near surface layers. Calculations of fluorescence intensities are presented, which are used for the evaluation of data obtained by total reflection X-ray fluorescence (TXRF) spectrometry. The calculation is based on a matrix formalism to account for standing wave phenomena due to transmission and reflection in layered material. For the determination of concentrations the model makes additional use of the fundamental parameter technique in order to include absorption and enhancement effects of the fluorescence radiation. On the basis of experimental data some capabilities of this nondestructive and contactless probing technique are presented.
引用
收藏
页码:449 / 456
页数:8
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