DEVITRIFICATION IN BOROPHOSPHOSILICATE GLASS-FILMS USED IN VLSI

被引：22

作者：

SCHNABLE, GL

FISHER, AW

SHAW, JM

机构：

[1] David Sarnoff Research Center, Princeton

来源：

关键词：

D O I：

10.1149/1.2086340

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

[No abstract available]

引用

页码：3973 / 3974

页数：2

共 24 条

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