FACTORS AFFECTING FORMATION OF ALPHA-PHASE AND BETA-PHASE OF SILICON-NITRIDE

被引：13

作者：

CAMPOSLORIZ, D

RILEY, FL

机构：

来源：

JOURNAL OF MATERIALS SCIENCE | 1978年 / 13卷 / 05期

关键词：

D O I：

10.1007/BF00544710

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1125 / 1127

页数：3

共 10 条

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[4]

CAMPOSLORIZ D, 1976, THESIS U LEEDS

[5]

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MURTHY, DYN ;

JACKSON, RL ;

LANG, J .

METABOLISM-CLINICAL AND EXPERIMENTAL, 1973, 22 (02) :275-282

[7] EFFECT OF OXIDE IMPURITIES ON NITRIDATION OF HIGH-PURITY SILICON [J].

GUTHRIE, RB ;

RILEY, FL .

JOURNAL OF MATERIALS SCIENCE, 1974, 9 (08) :1363-1365

[8]

Hanson M., 1958, CONSTITUTION BINARY

[9] SIALONS AND RELATED NITROGEN CERAMICS [J].

JACK, KH .

JOURNAL OF MATERIALS SCIENCE, 1976, 11 (06) :1135-1158

[10]

1971, THERMOCHEMICAL TABLE

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