TRANSMISSION SPUTTERING AND RECOIL IMPLANTATION FROM THIN METAL-FILMS UNDER ION-BOMBARDMENT

被引:29
作者
PERKINS, JG
STROUD, PT
机构
来源
NUCLEAR INSTRUMENTS & METHODS | 1972年 / 102卷 / 01期
关键词
D O I
10.1016/0029-554X(72)90528-9
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:109 / &
相关论文
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