AUTOMATIC CALIBRATION METHOD FOR PHASE-SHIFT SHADOW MOIRE INTERFEROMETRY

被引：24

作者：

DIRCKX, JJJ

DECRAEMER, WF

机构：

[1] University of Antwerp-RUCA, Department of Experimental Physics, Antwerp

来源：

APPLIED OPTICS | 1990年 / 29卷 / 10期

关键词：

D O I：

10.1364/AO.29.001474

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A new calibration procedure for phase shift moire interferometry is proposed. The method does not ask for a high precision machined calibration object and makes use only of the moire setup itself. The procedure is fast and fully automatic. The fringe plane distance λ was determined with a precision of 1.3%. We present control measurements on a plane surface and a perfect sphere confirming the value and the precision of λ. © 1990 Optical Society of America.

引用

页码：1474 / 1476

页数：3

共 7 条

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