CONDUCTING POLYANILINES - DISCHARGE LAYERS FOR ELECTRON-BEAM LITHOGRAPHY

被引：45

作者：

ANGELOPOULOS, M ^{[1
]}

SHAW, JM ^{[1
]}

KAPLAN, RD ^{[1
]}

PERREAULT, S ^{[1
]}

机构：

[1] IBM CORP,DIV GEN TECHNOL,FISHKILL,NY 12533

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 06期

关键词：

D O I：

10.1116/1.584524

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1519 / 1523

页数：5

共 21 条

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[7] POLYANILINE - PROTONIC ACID DOPING OF THE EMERALDINE FORM TO THE METALLIC REGIME
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[J]. SYNTHETIC METALS, 1986, 13 (1-3) : 193 - 205
[8] CLARKE TC, 1981, J CHEM SOC CHEM COMM, V8, P384
[9] DIARYLIODONIUM SALTS - NEW CLASS OF PHOTO-INITIATORS FOR CATIONIC POLYMERIZATION
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[J]. MACROMOLECULES, 1977, 10 (06) : 1307 - 1315
[10] PHOTOINITIATED CATIONIC POLYMERIZATION WITH TRIARYLSULFONIUM SALTS
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[J]. JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1979, 17 (04) : 977 - 999

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