PHYSICAL CHARACTERIZATION OF PB1ZR0.2TI0.8O3 PREPARED BY THE SOL-GEL PROCESS

被引:16
作者
BOZACK, MJ
WILLIAMS, JR
FERRARO, JM
FENG, ZC
JONES, RE
机构
[1] NATL UNIV SINGAPORE,DEPT PHYS,SINGAPORE 0511,SINGAPORE
[2] MOTOROLA INC,ADV PROD RES & DEV LAB,AUSTIN,TX 78721
关键词
D O I
10.1149/1.2044078
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
We have used Auger electron spectroscopy (AES), x-ray photoelectron spectroscopy (XPS), Raman spectroscopy, and Rutherford backscattering spectroscopy (RBS) to characterize lead zirconate-lead titanate (PbZrO3-PbTiO3) of stoichiometry Pb1Zr0.2Ti0.8O3 prepared by the sol-gel process. The films were deposited on a sputtered film of Pt and annealed at 700 degrees C 30 mm. Dramatic AES and XPS chemical effects are observed in the film due to charge transfer between Ti and Zr and O; the binding energy of the PZT XPS Ti2p(3/2) (Zr3d(5/2)) orbital shifts +5.2 eV (+4.3 eV) compared to the element and substantial shape changes are observed in the AES Ti(LMM) and O(KLL) peaks. Raman spectroscopy at both 300 and 80 K show that mode frequencies shift upward with decreasing temperature in accord with soft mode theory. Rutherford backscattering spectroscopy (RBS) indicates that the stoichiometry of Pb1Zr0.2Ti0.8O3, on Pt changes little during 700 degrees C thermal annealing in oxygen because the oxygen from the gas phase replaces the oxygen lost to the substrate by thermal diffusion.
引用
收藏
页码:485 / 491
页数:7
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