FABRICATION OF MAGNETIC MICROSTRUCTURES BY USING THICK LAYER RESISTS

被引：12

作者：

LOCHEL, B

MACIOSSEK, A

KONIG, M

HUBER, HL

BAUER, G

机构：

[1] Fraunhofer-Institut für Mikrostrukturtechnik, D-1000 Berlin 33

来源：

MICROELECTRONIC ENGINEERING | 1993年 / 21卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(93)90111-H

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A fabrication process for 3D ferromagnetic micro patterns of an Fe/Ni alloy, based on conventional UV contact printing for thick resist layers, and on a pulse galvanoplating process, was investigated to form microstructures with high layer thickness and high aspect ratio. Resist patterns with 5 to 10 mum minimum feature size and up to 80 mum height were fabricated. From a weakly acidic Fe/Ni bath alloyed layers with Fe content up to 55% were deposited. The formed material has excellent corrosion resistivity and mechanical properties comparable to stainless steel. The material was found to be ferromagnetic with a high per meability.

引用

页码：463 / 466

页数：4

共 6 条

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[3] Engelmann, Ehrmann, Simon, Reichl, Fabrication of high depth-to-width aspect ratio microstructures, Proceedings IEEE Micro Electro Mechanical Systems '92, pp. 93-98, (1992)
[4] Wagner, Kreutzer, Benecke, Linear and rotational magnetic micromotors fabricated using silicon technology, Proceedings IEEE Micro Electro Mechanical Systems '92, pp. 183-189, (1992)
[5] Tan, Mayadas, Romankiw, IBM Techn. Disclos. Bull., 12, (1969)
[6] Lochel, Grimm, Mechel, Huber, Proceedings Surtec '91, pp. 17-161, (1991)

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