INELASTIC-ELECTRON-SCATTERING CROSS-SECTIONS FOR SI, CU, AG, AU, TI, FE, AND PD

Inelastic-scattering cross sections of 300-10 000-eV electrons in Si, Ti, Fe, and Pd and of 300-2000-eV electrons in Cu, Ag, and Au have been investigated theoretically and experimentally. The product of the inelastic mean free path and the cross section were determined experimentally through an analysis, based on a recent formula, of reflection electron-energy-loss spectra. To study energies above 2000 eV a special experimental setup was developed. Theoretical cross sections were determined through a dielectric-response description of the solid-electron interaction using Drude-Lindhard model dielectric functions. At high energies, good agreement is observed between theoretically and experimentally determined cross sections. At lower energies differences are observed. These are discussed partly in terms of a breakdown of the dielectric model used, and partly surface excitations.