XPS INVESTIGATION OF THE A-CH/AL INTERFACE

被引:72
作者
HAUERT, R
PATSCHEIDER, J
TOBLER, M
ZEHRINGER, R
机构
[1] BERNA AG,CH-4600 OLTEN,SWITZERLAND
[2] IBM CORP,DIV RES,ALMADEN RES CTR,SAN JOSE,CA 95120
关键词
D O I
10.1016/0039-6028(93)90395-Z
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The original state of the interface between ultrahard amorphous hydrogenated carbon (a-C: H) and aluminum was analyzed by non-destructive in-situ direct ion beam deposition (CH4, -400 V) as well as angle resolved XPS (X-ray photoelectron spectroscopy) analysis through a thin a-C: H coating. Depending on the deposition conditions a 0.6 to 1.9 nm thick Al4C3 interlayer, held responsible for the good adhesion between a-C:H and Al, could clearly be resolved. Furthermore, an interaction between a-C:H and Al4C3 at the a-C:H/Al4C3 interface was detected. The ability of C and Al to form a reactive Al4C3 interface as well as an interaction of a-C:H with Al4C3 has also been confirmed by XPS and AES sputter depth profile analysis.
引用
收藏
页码:121 / 129
页数:9
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