SPUTTERING OF FECO-B AMORPHOUS FILMS WITH SOFT MAGNETIC-PROPERTIES

被引：16

作者：

SHIMADA, Y ^{[1
]}

HASEGAWA, T ^{[1
]}

KOJIMA, H ^{[1
]}

机构：

[1] SHOWA DENKO KK,MINATO KU DAIMON,TOKYO,JAPAN

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1981年 / 17卷 / 02期

关键词：

D O I：

10.1109/TMAG.1981.1061189

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1199 / 1203

页数：5

共 11 条

[1] PROPERTIES OF TRANSITION METAL-METALLOID FERROMAGNETIC THIN-FILMS
ABOAF, JA
KOBLISKA, RJ
KLOKHOLM, E
[J]. IEEE TRANSACTIONS ON MAGNETICS, 1978, 14 (05) : 941 - 943
[2] NON-MAGNETOSTRICTIVE AMORPHOUS SOFT MAGNETIC THIN-FILM MATERIAL OF HIGH MAGNETIZATION
BRUNSCH, A
[J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (11) : 7600 - 7602
[3] LOW-COERCIVITY AMORPHOUS MAGNETIC ALLOY-FILMS
HEIMAN, N
HEMPSTEAD, RD
KAZAMA, N
[J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (11) : 5663 - 5667
[4] AMORPHOUS FERROMAGNETIC THIN-FILMS
KOBLISKA, RJ
ABOAF, JA
GANGULEE, A
CUOMO, JJ
KLOKHOLM, E
[J]. APPLIED PHYSICS LETTERS, 1978, 33 (05) : 473 - 475
[5] MAGNETIC ANNEALING OF ZERO MAGNETOSTRICTIVE AMORPHOUS ALLOY WITH HIGH SATURATION INDUCTION
KOHMOTO, O
FUJISHIMA, H
OJIMA, T
[J]. IEEE TRANSACTIONS ON MAGNETICS, 1980, 16 (02) : 440 - 443
[6] MICROSTRUCTURE AND MAGNETISM IN AMORPHOUS RARE-EARTH-TRANSITION-METAL THIN-FILMS .1. MICROSTRUCTURE
LEAMY, HJ
DIRKS, AG
[J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (06) : 3430 - 3438
[7] MAGNETIC-PROPERTIES OF AMORPHOUS FE-SI-B FILMS PREPARED BY CO-SPUTTERING
NAOE, M
YAMAMOTO, H
YAMANAKA, S
[J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (11) : 7606 - 7608
[8] MAGNETIC-PROPERTIES AND THERMAL-STABILITY OF FE-B AMORPHOUS FILMS
SHIMADA, Y
KOJIMA, H
[J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (03) : 1541 - 1543
[9] MAGNETIC-PROPERTIES OF AMORPHOUS FE-SI THIN-FILMS
SHIMADA, Y
KOJIMA, H
[J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (09) : 4156 - 4159
[10] MAGNETIC THIN-FILM INDUCTORS FOR INTEGRATED-CIRCUIT APPLICATIONS
SOOHOO, RF
[J]. IEEE TRANSACTIONS ON MAGNETICS, 1979, 15 (06) : 1803 - 1805

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