INFLUENCE OF ADSORPTION AT ENDOTHERMIC SURFACE SITES ON PUMPING AND OUTGASSING RATE FOR ION GAUGES, RESIDUAL GAS ANALYZERS, AND OTHER SIMILAR DEVICES

被引:6
作者
WINTERS, HF
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1970年 / 7卷 / 01期
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D O I
10.1116/1.1315814
中图分类号
O59 [应用物理学];
学科分类号
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页码:262 / &
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