AN OPTICAL INSITU METHOD FOR LAYER GROWTH-CHARACTERIZATION

被引：11

作者：

DIETZ, N

LEWERENZ, HJ

机构：

[1] Hahn-Meitner-Institut Berlin, Bereich Photochemische Energieumwandlung, Postfach 390128, Glienicker Strasse 100

来源：

APPLIED SURFACE SCIENCE | 1993年 / 69卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(93)90532-G

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

An optical method is presented which allows the in-situ characterization of growing films on solid substrates. The technique is based on the changes in reflectivity of p-polarized light at the substrate Brewster angle. The changes in the reflectivity are shown to be large enough to monitor layer growth as well as to reveal the film thickness and the optical constants of the film.

引用

页码：350 / 354

页数：5

共 9 条

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[4] SIMULTANEOUS DETECTION OF OPTICAL CONSTANTS-EPSILON-1 AND CONSTANTS-EPSILON-2 BY BREWSTER-ANGLE REFLECTIVITY MEASUREMENTS
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LEWERENZ, HJ
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[7] BREWSTER-ANGLE SPECTROSCOPY - A NEW METHOD FOR CHARACTERIZATION OF DEFECT LEVELS IN SEMICONDUCTORS
LEWERENZ, HJ
DIETZ, N
[J]. APPLIED PHYSICS LETTERS, 1991, 59 (12) : 1470 - 1472
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