共 10 条
[1]
ADVANCES IN MOLTEN-METAL FIELD-ION SOURCES
[J].
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH,
1981, 189 (01)
:111-116
[2]
LIQUID-METAL ALLOY ION SOURCES FOR B, SB, AND SI
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1981, 19 (04)
:1182-1185
[4]
ISHIKAWA J, 1986, 4TH INT C LOW EN ION
[6]
STEENBERGEN AV, 1965, IEEE T NUCL SCI, V12, P726
[7]
Swanson L. W., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P325
[10]
A MASS-SEPARATING FOCUSED-ION-BEAM SYSTEM FOR MASKLESS ION-IMPLANTATION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1981, 19 (04)
:1158-1163