SILICON-MICROMACHINED GAS-CHROMATOGRAPHY SYSTEM USED TO SEPARATE AND DETECT AMMONIA AND NITROGEN-DIOXIDE .2. EVALUATION, ANALYSIS, AND THEORETICAL MODELING OF THE GAS-CHROMATOGRAPHY SYSTEM

被引：33

作者：

KOLESAR, ES ^{[1
]}

RESTON, RR ^{[1
]}

机构：

[1] UNIFORMED SERV UNIV HLTH SCI,SCH MED,BETHESDA,MD 20853

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1994年 / 3卷 / 04期

关键词：

D O I：

10.1109/84.338635

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A miniature gas chromatography (GC) system was designed and developed using silicon micromachining and integrated circuit (IC) processing techniques. The MMGC system can separate parts-per-million (ppm) ammonia and nitrogen dioxide concentrations in less than 30 minutes when isothermally operated (80 degrees C) at 40 psi. The heat of adsorption of nitrogen dioxide (0.38 eV) on a CuPc thin film (0.2 mu m thick) was also independently established. As a result of the MMGC system's performance evaluation, several of the assumptions invoked in the initial design were re-investigated, and a refined technique for optimizing the MMGC system's operation and performance was developed. [97]

引用

页码：147 / 154

页数：8

共 7 条

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[2]

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[3]

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