THE FIRST VOLATILE DI(ORGANOGALLIO) TRANSITION-METAL CARBONYLATES - CIS-(CO)(4)FE(GA[(CH2)(3)NME(2)](R))(2)(R(T)BU OR C6H5), PRECURSORS FOR GALLIUM RICH THIN FE-GA ALLOY-FILMS

被引:9
作者
FISCHER, RA
SCHULTE, MM
PRIERMEIER, T
机构
[1] Anorganisch-chemisches Institut der Technischen Universität München, D-85747 Garching
关键词
GALLIUM; MOCVD; THIN ALLOY FILMS; IRON; METAL CARBONYLANIONS;
D O I
10.1016/0022-328X(94)05349-G
中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
摘要
cis-(Co)(4)Fe{Ga[(CH2)(3)NMe(2)](R)}(2) (R equivalent to (t)Bu (1a) or C6H5 (1b)), the first examples of previously unknown transition metal gallium complexes of the type [L(CO)(n)M][GaR(2)(Do)](a) (a > 1), exhibiting a gallium-to-transition-metal ratio [Ga]/[M] > 1, have been synthesized in high yields by the reaction of [(CO)(4)Fe]K-2 with the mixed alkylated and intramolecularly base stabilized organo gallium chlorides ClGa[(CH2)(3)NMe(2)](R). The new compounds were characterized by elemental analysis, IR, NMR and mass spectrometry. Compound la sublimes without decomposition and served as a gallium-rich single-source precursor to deposit remarkably pure gallium-rich Fe1Ga2-x (x less than or equal to 0.1) thin films by low pressure metal-organic chemical vapor deposition at very low temperatures (about 200 degrees C; 0.1 Pa).
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页码:139 / 142
页数:4
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