ELECTRON MICROSCOPIC INVESTIGATION OF TRANSVERSE SECTIONS OF THIN FILMS ON SOLID SUBSTRATES

被引：12

作者：

BACH, H

SCHRODER, H

机构：

[1] Jenaer Glaswerk Schott and Gen., Mainz

来源：

ZEITSCHRIFT FUR PHYSIK | 1969年 / 224卷 / 1-3期

关键词：

D O I：

10.1007/BF01392239

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

A method is described which allows to prepare transverse sections of thin films by means of an ion etching technique so that transmission electron micrographs of the film structure can be carried out. A section through a 6-layered optical film with a total thickness of 0.62 μm is shown as an example. © 1969 Springer-Verlag.

引用

页码：122 / &

共 14 条

[1] Bach H., 1968, THIN SOLID FILMS, V1, P255
[2] BACH H, THESIS
[3] BACH H, 1964, BOSCH TECHN BERICHTE, P10
[4] ELECTRON MICROSCOPY OF DISLOCATIONS AND OTHER DEFECTS IN SAPPHIRE AND IN SILICON CARBIDE THINNED BY SPUTTERING
DRUM, CM
[J]. PHYSICA STATUS SOLIDI, 1965, 9 (02): : 635 - &
[5] HASS G, 1969, PHYSICS THIN FILM ED, V5
[6] PREPARATION OF THIN SECTIONS BY ION BOMBARDMENT FOR TRANSMISSION ELECTRON MICROSCOPY
HIRTHE, WM
MELVILLE, AT
WACKMAN, PH
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1967, 38 (02) : 223 - &
[7] KELLER R, 1949, HELV PHYS ACTA, V22, P79
[8] LUTZ H, 1964, Z NATURFORSCH A, V19, P1979
[9] THICKNESS ESTIMATION OF CARBON FILMS BY ELECTRON MICROSCOPY OF TRANSVERSE SECTIONS AND OPTICAL DENSITY MEASUREMENTS
MORETZ, RC
JOHNSON, HM
PARSONS, DF
[J]. JOURNAL OF APPLIED PHYSICS, 1968, 39 (12) : 5421 - &
[10] PAWLJENKO OP, 1965, IZV AKAD NAUK SSSR F, V29, P626

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