SEMICONDUCTING CDTE MICROCRYSTALLINE-DOPED SIO2 GLASS THIN-FILMS PREPARED BY RF-SPUTTERING

被引:48
作者
NASU, H [1 ]
TSUNETOMO, K [1 ]
TOKUMITSU, Y [1 ]
OSAKA, Y [1 ]
机构
[1] HIROSHIMA UNIV,FAC ENGN,DEPT ELECT ENGN,HIROSHIMA 724,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1989年 / 28卷 / 05期
关键词
D O I
10.1143/JJAP.28.L862
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:L862 / L864
页数:3
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