A NUMERICAL-SIMULATION OF RF GLOW-DISCHARGE CONTAINING AN ELECTRONEGATIVE GAS-COMPOSITION

A one-dimensional continuum model of glow discharge, which contains three charged particle species of electrons, positive and negative ions, is numerically solved. The model consists of three continuity equations of each particle species and electron temperature equation with Poisson's equation. The charged particle formation mechanisms of the ionization and the attachment which depend on the electron energy are included in the model. A numerical algorithm based on the finite difference method on nonuniform staggered grids is developed and the results are obtained on a relatively small workstation computer. General behaviors of particle movements are similar to the previous works, but the reaction rates reveal somewhat different features.