SURFACE-ANALYSIS OF GOLD CONTAINING POLYIMIDE FILMS

被引:13
作者
MADELEINE, DG
SPILLANE, SA
TAYLOR, LT
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 03期
关键词
D O I
10.1116/1.574158
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
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页码:347 / 353
页数:7
相关论文
共 13 条
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