SECONDARY ION QUADRUPOLE MASS-SPECTROMETER FOR DEPTH PROFILING-DESIGN AND PERFORMANCE EVALUATION

被引：121

作者：

MAGEE, CW

HARRINGTON, WL

HONIG, RE

机构：

来源：

关键词：

D O I：

10.1063/1.1135438

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：477 / 485

页数：9

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