APPLICATION AND COMPARISON OF ALGORITHMS FOR THE EVALUATION OF INTERFEROGRAMS

被引:32
作者
KRAUS, G [1 ]
GAUGLITZ, G [1 ]
机构
[1] UNIV TUBINGEN,INST PHYS & THEORET CHEM,MORGENSTELLE 8,W-7400 TUBINGEN 1,GERMANY
来源
FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY | 1992年 / 344卷 / 4-5期
关键词
D O I
10.1007/BF00322701
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Interferometry is a valuable tool for the fast and non-destructive determination of the thickness of optically transparent films. Combined with the advantages of fibre optical measurements the technique is used in many fields. This paper describes three methods for the evaluation of interference spectra obtained by measurements of reflectance at thin polymer films in the visible range suitable for on-line process control in the sub second range and for the absolute determination of both film thickness and dispersion.
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页码:153 / 157
页数:5
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