MEASUREMENT OF ROUGHNESS EXPONENT FOR SCALE-INVARIANT ROUGH SURFACES USING ANGLE-RESOLVED LIGHT-SCATTERING

被引:14
作者
FANG, K
ADAME, R
YANG, HN
WANG, GC
LU, TM
机构
[1] Department of Physics, Applied Physics and Astronomy, Rensselaer Polytechnic Institute, Troy
关键词
D O I
10.1063/1.113908
中图分类号
O59 [应用物理学];
学科分类号
摘要
It is shown that, by modifying the conventional light scattering geometry, it is possible to characterize the root-mean-square roughness w in a scale-invariant rough surface for w values more than one order of magnitude larger than those previously reported. Measurement of w on the order of the wavelength of light has been demonstrated. A consequence of this development is that one can combine the diffraction theory and the measurement to determine the surface roughness exponent α, which was not possible under conventional light scattering conditions.© 1995 American Institute of Physics.
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页码:2077 / 2079
页数:3
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