SPUTTERING OF NIOBIUM BY NIOBIUM, HYDROGEN, DEUTERIUM, AND HELIUM IONS IN 10-KEV TO 80-KEV ENERGY RANGE

被引：33

作者：

SUMMERS, AJ

FREEMAN, NJ

DALY, NR

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1971年 / 42卷 / 12期

关键词：

D O I：

10.1063/1.1659854

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4774 / &

共 12 条

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