CHARGE-EXCHANGE PROCESSES IN LOW-ENERGY HE+ ION-SCATTERING FROM SI AND PD2SI SURFACES

被引：18

作者：

VANLEERDAM, GC

LENSSEN, KMH

BRONGERSMA, HH

机构：

[1] Department of Physics, Eindhoven University of Technology, 5600 MB Eindhoven

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1990年 / 45卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(90)90858-R

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The surface of Si and thin layers of Pd2Si on Si have been studied by low-energy He+ ion scattering. The occurrence of the observed low-energy tails is attributed to reionization at the surface of He neutrals scattered from subsurface layers. It is shown that the tails provide valuable in-depth information. © 1990.

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页码：390 / 393

页数：4

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