ELECTRON-BEAM FABRICATION OF SUBMICROMETER BIPOLAR-TRANSISTORS FOR HIGH-FREQUENCY LOW-CURRENT OPERATION

被引：5

作者：

GREENEICH, EW

TOLLIVER, DL

GONZALES, AJ

机构：

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1981年 / 28卷 / 11期

关键词：

D O I：

10.1109/T-ED.1981.20612

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1346 / 1354

页数：9

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