Relaxation of the electron energy in the post-discharge of an He-N-2 mixture

被引:26
作者
Dilecce, G. [1 ]
De Benedictis, S. [1 ]
机构
[1] Univ Bari, Dipartmento Chim, Ctr Studio Chim Plasmi, CNR, I-70126 Bari, Italy
关键词
D O I
10.1088/0963-0252/2/2/008
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The electron energy distribution function in the post-discharge of a pulsed RF discharge has been measured by means of a time-resolved Langmuir probe technique, in an He-N-2 mixture at 0.2 and 0.5 Torr. Within the limits of the technique, it is shown that the presence of N-2 has the effect of slowing the decay of the electron average energy, this being more evident the higher is the N-2 content of the mixture. This phenomenon can be ascribed to the presence of long-lived vibrational or electronic states in the afterglow which release their energy to the electron gas.
引用
收藏
页码:119 / 122
页数:4
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