LOWER LIMITS FOR PARALLEL IMPURITY FLUXES IN PLT EDGE PLASMA

被引:24
作者
COHEN, SA
DYLLA, HF
机构
关键词
D O I
10.1016/0022-3115(78)90182-4
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:425 / 430
页数:6
相关论文
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