CROSS-SECTIONAL STRUCTURES OF CONICR/CR BILAYER AND MULTILAYER THIN-FILMS

The cross-sectional structure of CoNiCr/Cr bilayer and multilayer thin films is investigated by HRTEM. Results showed that the orientation relationship between CoNiCr and Cr and the crystallographic orientation of CoNiCr is controlled by the orientation of the Cr column. Similar results are found for the multilayer film. The crystallographic orientation of the Cr interlayer and the second CoNiCr layer is identical to that of the Cr underlayer and the first CoNiCr layer. The misfit at the interface is partially relieved by misfit dislocations and the rest remains as elastic strain.